The Integrated Dynamics Engineering (IDE) Group is a worldwide leader in developing and manufacturing environmental controls for active and passive vibration isolation, EMI active compensation, and acoustic isolation for research, metrology, lithography and medical systems; plus precision motion controls and robots for wafer and mask handling, tool platforms and EFEMs for semiconductor OEMs.
Starting with unique active and passive vibration isolation systems, IDE expanded its product array to include a range of solutions for the most demanding industries in the instrumentation and metrology fields.
MRS Fall Meeting & Exhibit | Boston, Massachusetts
November 27 – December 2, 2016
Hynes Convention Center and adjacent Sheraton Boston Hotel